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Thin films making by magnetron sputtering cathode having high deposition rate and wide erosion area
Thin films making by magnetron sputtering cathode having high deposition rate and wide erosion area
2005
Jang-Sick Park
Tae-Woo Kim
Jae-eun Heo
Kanp Du Lee
Sang-Won Park
Won Sul Ahn
Keywords:
Erosion
Sputter deposition
Thin film
Metallurgy
Electrical engineering
Cathode
Chemistry
Engineering physics
deposition rate
Correction
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