Biaxially aligned YBCO film tapes fabricated by inclined substrate pulsed laser deposition

Biaxially aligned yttria-stabilized-zirconia (YSZ) films on Ni-based alloy substrates were realized with high deposition rate of 0.5 μ m/min. by inclined substrate deposition (ISD) technique without ion beam assist. Columnar structure toward plasma plume suggested self-shadowing effect in ISD process. Biaxially aligned YBCO films up to 5 μ m thick were obtained on the ISD grown YSZ. To improve overall critical current density (Joa), increase of Ic values and decrease of substrate thickness were investigated. The best Joa value of 5300A/cm2 was obtained by continuous PLD, where the Ic value was 46.3A and the substrate thickness was 80 μ m. Bending tests and stress tolerance measurements of thick YBCO film on thin substrate were carried out, and the results showed high flexibility and high strength to axial tensile stress.