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Characteristics of a fast rise time power supply for a pulsed plasma reactor
Characteristics of a fast rise time power supply for a pulsed plasma reactor
1993
Phil A. Lawless
Toshiaki Yamamoto
Sandra Poteat
Charles B. Boss
Carlos M. Nunez
Geddes H. Ramsey
Roger Engels
Keywords:
Rise time
Switched-mode power supply
Plasma
High-voltage direct current
Electronic engineering
Biochemistry
Biology
Correction
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