X-Ray Mask Inspection using a Vector Scan Electron-Beam System

Chlorofluorinated carboxylic acids may be effectively produced by an oxychlorofluorination process by reacting a gaseous mixture of a starting material selected from a saturated aliphatic carboxy containing compound, a saturated aliphatic carboxylic acid halide and a saturated aliphatic aldehyde in which all atoms are selected from C, H and O, and corresponding hydrohalogenated compounds in which the halo atoms are selected from chloro and fluoro, or mixtures thereof, an oxygen-containing gas, a chlorinating agent selected from the group consisting of HCl and Cl2 and mixtures thereof, and HF, in the presence of a Deacon catalyst supported by a stable, inert metal salt carrier.