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A hollow cathode ion source for production of primary ions for the BNL EBIS
A hollow cathode ion source for production of primary ions for the BNL EBIS
2013
J. Alessi
E. Beebe
C. Carlson
D. Mccafferty
A. Pikin
J. Ritter
Keywords:
Ion gun
Atomic physics
Ion beam
Focused ion beam
Cathode
Ion
Ion beam deposition
Ion source
Chemistry
Materials science
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