Pyrolysis of novel and safe phosphorous sources for chemical-beam epitaxy applications

It is well known that PH3 is highly toxic and safer alternatives need to be found. TBP has a favorable vapor pressure at room temperature and decomposes at a lower temperature than PH3. Results of a systematic investigation of the pyrolysis of novel phosphorous (P) precursors for chemical beam epitaxy (CBE) that are safer than phosphine are presented. In particular, three topics pertinent to CBE are presented: (1) technical details on the pyrolysis conditions and growth using several novel condensed-phase P-precursors, including tertiarybutylphosphine (TBP); (2) a custom-designed gas-source group V cracker cell; and (3) methods to reduce the cracking temperature of P-containing sources.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.