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MEMS sub-nanonewton force sensor with tunable sensitivity and servo-assisted position-feedback
MEMS sub-nanonewton force sensor with tunable sensitivity and servo-assisted position-feedback
2017
Alessandro Nastro
Marco Ferrari
Alfio-Lip Russo
Raffaele Ardito
Vittorio Ferrari
Keywords:
Servo
Control engineering
Microelectromechanical systems
Materials science
force sensor
Electrical engineering
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