MEMS Accelerometer with SAW

V G Nefedov,Oleg V. Shakin,Leonid V. Grigoryev,I S Morozov,N. V. Zhuravlev

MEMS Accelerometer with SAW

2018

V G Nefedov
Oleg V. Shakin
Leonid V. Grigoryev
I S Morozov
N. V. Zhuravlev

Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.

Keywords:

Acceleration
Microelectromechanical systems
Acoustics
Accelerometer
Atmospheric temperature range
Materials science
mems sensors
Optoelectronics

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations