Old Web
English
Sign In
Acemap
>
Paper
>
Study of the early stage kinetics of SOI formation in stimulated regimes
Study of the early stage kinetics of SOI formation in stimulated regimes
1999
Litovchenko
B. Romanyuk
A. A. Efremov
Melnik
Cor Claeys
Jan Vanhellemont
Keywords:
Condensed matter physics
Silicon on insulator
Materials science
Kinetics
Chemical physics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]