Design of Near Infrared and Visible Kinetic Inductance Detectors Using MIM Capacitors

We are developing superconducting Microwave Kinetic Inductance Detectors to operate at near infrared and optical wavelengths for astronomy. In order to efficiently meet with the requirements of astronomical applications, we propose to replace the interdigitated capacitor by a metal–insulator–metal capacitor which has the advantage of presenting a larger capacitance value within a much smaller space. The pixel will occupy a space of typically 100 × 85 µm which is nine times less than a typical pixel size using the interdigitated capacitor operating at the same frequency, below 2 GHz.