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Epitaxial Integrated E-dE Silicon Detector with a Buried Low-Resistive Diffused Layer
Epitaxial Integrated E-dE Silicon Detector with a Buried Low-Resistive Diffused Layer
1980
C. Kim
H. Kim
K. Kikuchi
K. Husimi
S. Ohkawa
Y. Fuchi
Keywords:
Nuclear magnetic resonance
Ion implantation
Detector
Hybrid silicon laser
Impurity
Diode
Epitaxy
Physics
Silicon
Resistive touchscreen
Optoelectronics
Etching
Correction
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