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Layer Properties in PECVD Reactor for Micromorph® Solar Modules
Layer Properties in PECVD Reactor for Micromorph® Solar Modules
2010
Ch. Ellert
A. Taha
G. Tipaka
A. Stoeckle
A. Salabas
S. Jost
C. Goury
Devendra Chaudhary
M. Klindworth
Keywords:
Micromorph
Plasma-enhanced chemical vapor deposition
Electronic engineering
Materials science
Optoelectronics
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