Thick capacitive meshes on polyimide substrates

Thick capacitive meshes of nickel on substrates of thickness 25 lm have been produced by electroplating into a photoresist mould. The Micro-Stripes program by Flomerics has been used for the interpretation of the experimentally measured far infrared spectrum. The measured reflection resonance mode and the transmission wave guide mode agree well with the analytical predictions. 2003 Elsevier B.V. All rights reserved.