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Modification of Fluorinated Al 2 O 3 Surface by Irradiating H 2 and O 2 Plasmas
Modification of Fluorinated Al 2 O 3 Surface by Irradiating H 2 and O 2 Plasmas
2009
Kazuhiro Miwa
Kenji Usami
Noriharu Takada
Koichi Sasaki
Keywords:
Analytical chemistry
Atomic physics
Plasma
Physics
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