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Characterization of Self Assembled Monolayers for Ultra Low-k Films
Characterization of Self Assembled Monolayers for Ultra Low-k Films
2005
B. Ramana Murthy
Wan Mun Yee
Ahila Krishnamoorthy
V Anand
K.Y. Yong
S.F. Choy
Kn Prasad
R. Kumar
Don C Frye
Keywords:
Nanotechnology
Materials science
Self-assembled monolayer
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