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Al2O3 MIM capacitor with various metal bottom electrodes for DRAM applications
Al2O3 MIM capacitor with various metal bottom electrodes for DRAM applications
2005
Seung-Woo Do
Cheol Yeong Jang
Dae Gab Lee
Sung-Hwan Choi
Yong Hyun Lee
Yeong-kwan Kim
Seung Hwan Lee
Sung Je Choi
Hong Bae
Wan-Don Kim
Keywords:
Capacitor
Electrode
Electronic engineering
Dram
Materials science
Metal
Optoelectronics
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