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Dual Ion Beam System for the Deposition of Wide Bandgap Semiconductors
Dual Ion Beam System for the Deposition of Wide Bandgap Semiconductors
1996
Christian Linsmeier
Nels Freed
Ignatius S. T. Tsong
Keywords:
Ion beam mixing
Wide-bandgap semiconductor
Electron beam-induced deposition
Ion beam
Auger electron spectroscopy
Focused ion beam
Materials science
Low-energy ion scattering
Ion beam deposition
Analytical chemistry
Nuclear magnetic resonance
Correction
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