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High activation in n+/p Ge and formation of shallow junction by Flash Lamp Anneal(FLA)
High activation in n+/p Ge and formation of shallow junction by Flash Lamp Anneal(FLA)
2016
Hideaki Tanimura
Hikaru Kawarazaki
Yukio Ono
Takahiro Yamada
Shinichi Kato
Takayuki Aoyama
Ippei Kobayashi
Keywords:
Annealing (metallurgy)
Flash-lamp
Crystallography
Germanium
Photochemistry
Chemistry
Analytical chemistry
shallow junction
high activation
Correction
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