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Influence of Intrinsic Gettering on Silicon Recombination Properties and their Relation to Device Performance
Influence of Intrinsic Gettering on Silicon Recombination Properties and their Relation to Device Performance
1987
Kittler
Seifert
Keywords:
Spontaneous emission
Silicon
Etching (microfabrication)
Optoelectronics
Materials science
Length measurement
Getter
Integrated circuit
Recombination
Correction
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