Metallization technology of SiC power module in high temperature operation

We investigated a new metallization layer has both functions in high temperature reliability with Ag sinter joining and in high temperature adhesion with insulating resin. As a result, it was found that CoW metallization layer works effectively from above two perspectives. Initial shear strength of sintered Ag joints on CoW plated layer was about 46 MPa, which is better joint strength than that of Au or Ag plated layer. Furthermore, the shear strength of insulating resin on a CoW plated layer was about 21 MPa at 225 °C, which is almost the same adhesion strength as that of Ni or Ni/Au plated layer.