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Quick preparation of thin films and characteristics of ablation plasma produced by ion-beam evaporation
Quick preparation of thin films and characteristics of ablation plasma produced by ion-beam evaporation
1992
Sonegawa
Kang
Hoshino
Ohashi
Shimotori
Furuuchi
Masugata
Yatsui
Keywords:
Optoelectronics
Carbon
Ion beam
Plasma
Evaporation
Thin film
Silicon
ablation plasma
Materials science
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