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Profiled Lightly Doped Drain (PLDD) Structure for High Reliable NMOSFETs
Profiled Lightly Doped Drain (PLDD) Structure for High Reliable NMOSFETs
1985
Y. Toyoshima
N. Nihira
K. Kanzaki
Keywords:
Semiconductor device
Engineering
Electronic engineering
Sheet resistance
Doping
Voltage
Impurity
Correction
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