Integrated optical diagnostics for miniature devices

Methods to perform optical diagnostics in MEMS and meso-scale devices are described. The techniques utilize waveguide technology whose materials are similar to those used for MEMS fabrication. To achieve maximum optical access, these waveguides are integrated into microdevices at the time of fabrication. Possible optical diagnostics include species concentration measurements, particulate detection, and droplet characterization. Owing to the small characteristic length scales involved, these measurements are not spatially resolved, but rather can provide and “on-off’ answer unobtainable without an integrated diagnostics approach. Also, micro-machined, in sitzl, diagnostic techniques suitable for on-board spacecraft health monitoring is discussed.