Failure Risk and Control of Nitrogen Trifluoride Tube-Bundle Container

Due to the rapid development of Chinese semiconductor industry and the expansion of chip manufacturing capacity, the storage and transportation of electronic special gas in ordinary gas cylinders has been unable to meet the demand. High pressure liquefied gas tube-bundle container is a better solution. Since 2017, Chinese machine manufacturer has started to be approved cautiously to manufacture high pressure liquefied gas tube-bundle container, including nitrogen trifluoride. But objectively speaking, the domestic regulations and standards about special equipment do not support the tube-bundle container containing high pressure liquefied gas. It is very important to identify the failure risk accurately. Through the analysis of the supervision mode and failure mode of high pressure liquefied gas tube-bundle container, six possible failure modes, including fatigue failure, ductile failure, brittle failure, corrosion failure, leakage failure and frame structure failure, were proposed. The corresponding risk control measures are studied, and relevant Suggestions are given to ensure the safety of tube-bundle container.