Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method

2010 
The invention discloses a quartz tuning fork-based nano measuring head, which is characterized in that a quartz tuning fork is adopted as a micro-force sensor for sensing sample micro-topography, a piezoelectric driver is fixed on one tuning fork arm of the quartz tuning fork, and a piezoelectric sensor is fixed on the other tuning fork arm; and the vibration direction of the quartz tuning fork is set to be vertical to the surface of a sample, the tuning fork arm on one side close to the sample is fixedly provided with a tungsten probe vertically pointing to the surface of the sample, a sine alternating-current signal serving as a vibration exciting signal is applied to the piezoelectric driver, and the piezoelectric sensor detects a tuning fork resonance signal. The vibration direction of the tuning fork is vertical to the surface of the sample, so the contact time of the probe and the sample is short, the damage to the sample is little, and the quartz tuning fork-based nano measuring head is particularly suitable for detecting the surface of soft materials with high precision and micro measuring force.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []