Old Web
English
Sign In
Acemap
>
Paper
>
Characterization of pyrolytic boron nitride as a diffusion source for silicon
Characterization of pyrolytic boron nitride as a diffusion source for silicon
1978
Joseph H. Nevin
Michael T. Helmig
Saul Aguiar
Keywords:
Analytical chemistry
Pyrolytic carbon
Boron nitride
Chemistry
Nitride
Inorganic chemistry
Silicon
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
3
References
1
Citations
NaN
KQI
[]