Element substrate inspection method, and a method for manufacturing a semiconductor device

PROBLEM TO BE SOLVED: To provide an evaluation method on a substrate having a semiconductor layer, where the characteristics of an element can be evaluated with high reliability. SOLUTION: The substrate, having the semiconductor layer has a closed loop circuit in which an antenna coil and a semiconductor element are connected in series and the surface of an area over which the circuit is formed, is covered with an insulating film. By using such a circuit, noncontact inspection can be carried out. Furthermore, a ring oscillator can be substituted for the closed loop circuit. COPYRIGHT: (C)2007,JPO&INPIT