Parametric analysis of AlAs wet oxidation process for application in VCSELs

The selective nature of wet oxidation of high Al content AlGaAs has been successfully employed in the fabrication of various highly efficient, low-threshold-current vertical cavity surface emitting laser (VCSEL) structures. For this technology to be used in batch manufacturing in a predictable way, a thorough understanding of the oxidation process is required. We describe a study on the kinetics of oxidation. We, for the first time, report our studies on the dependence of wet oxidation process on important process parameters like water bubbler temperature and N/sub 2/ gas flow rate.