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Acid formation and deprotection reaction by novel sulfonates in a chemical amplification positive photoresist
Acid formation and deprotection reaction by novel sulfonates in a chemical amplification positive photoresist
1990
Leo Schlegel
Takumi Ueno
Hiroshi Shiraishi
Nobuaki Hayashi
Takao Iwayanagi
Keywords:
Quantum yield
Ultraviolet
Photoresist
Organic chemistry
Inorganic chemistry
Chemistry
Photochemistry
chemical amplification
Correction
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