Spatial resolution studies for the PERCIVAL sensor

The PERCIVAL ("Pixelated Energy Resolving CMOS Imager, Versatile and Large") is a collaboration of DESY, RAL/STFC, ELETTRA, and DLS to develop a monolithic active pixel sensor (MAPS) to provide a suitable detector for photon science for the photon energy regime between 250 eV and 1 keV. An important performance parameter is the spatial resolution which can be inferred from the Modulation Transfer Function (MTF). The MTF measures in optical systems the relative contrast of a pattern in function of the spatial frequency. With a back-thinned and back-illuminated PERCIVAL prototype chip, dedicated MTF evaluation data were taken at Elettra's TwinMic Beamline in March 2014 at a photon energy of 535 eV. We will present our MTF derivation approaches together with MTF results for 3 pixel types of the irradiated test sensor.