Self-Compensation of PZT Errors in White Light Scanning Interferometry

One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 ${\mu}{\textrm}{m}$ .