Active positioning control of single cell/microbead in a micro-well array chip by dielectrophoresis

We present a micro-well array chip operated by negative dielectrophoresis for active positioning control of single cell or microbead. The prototype chip has been designed and fabricated to validate concept feasibility in a 2/spl times/2 micro-well array using silicon substrate and PDMS channel structures. We have successfully demonstrated capturing experiments of single polystyrene microbead (15/spl mu/m) into each micro-well by dielectrophoresis with control electrical signals of 10V/sub pp/ at 1 MHz.