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The Optimization of Metal Hard-Mask Based All-in-One Etch
The Optimization of Metal Hard-Mask Based All-in-One Etch
2014
Cheng-Long Zhang
Minda Hu
Jun-Qing Zhou
Dongjiang Wang
Qi-Yang He
Hai-Yang Zhang
Keywords:
Metal
Materials science
Composite material
hard mask
Optoelectronics
Correction
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