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Cu grain growth in damascene narrow trenches
Cu grain growth in damascene narrow trenches
2008
Sylvain Maitrejean
V. Carreau
Olivier P. Thomas
S. Labat
Belkhiri Kaouache
Marc Verdier
Joel Lepinoux
Yves Bréchet
Marc Legros
Joël Douin
Cyril Cayron
Olivier Sicardy
Daniel Weygand
O Dubreuil
P. Normandon
Keywords:
Grain growth
Materials science
Copper interconnect
Metallurgy
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