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Influence of Deposition Parameters on TiCxN1-x Composite Films by Multi-aRC Ion Plating
Influence of Deposition Parameters on TiCxN1-x Composite Films by Multi-aRC Ion Plating
2015
Deqing Ke
Yingjun Pan
Heng Zhang
Bo Hong
Xufeng Lu
Keywords:
Ion plating
Composite material
Arc (geometry)
Materials science
Composite number
Deposition (law)
Correction
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