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High Position Resolution MEMS Fabry-Perot Tunable Filter with Dual Electrodes Electrostatic Actuator
High Position Resolution MEMS Fabry-Perot Tunable Filter with Dual Electrodes Electrostatic Actuator
2013
Nozomu Hirokubo
Hiroshi Komatsu
Nobuaki Hashimoto
Makoto Sonehara
Toshiro Sato
Keywords:
Fabry–Pérot interferometer
Actuator
Electronic engineering
Electrode
Control engineering
Microelectromechanical systems
Engineering
position resolution
electrostatic actuator
Correction
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