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Optical Fourier transform scatterometry for LER and LWR metrology
Optical Fourier transform scatterometry for LER and LWR metrology
2005
Pierre Boher
Jordi Petit
Thierry Leroux
Johann Foucher
Yohan Desières
Jerome Hazart
Patrick Chaton
Keywords:
Fourier optics
Metrology
Fourier transform
Atomic force microscopy
Fourier transform spectroscopy
Fourier transform infrared spectroscopy
Optics
Materials science
Light scattering
Correction
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