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Fabrication of a pMUT using silicon bulk micromachining and a sputtered PZT layer
Fabrication of a pMUT using silicon bulk micromachining and a sputtered PZT layer
2002
William Daniau
K. Dogheche
Sylvain Ballandras
Eric Cattan
Denis Remiens
W. Steichen
P. Blind
Keywords:
Materials science
Bulk micromachining
layer
Silicon
Fabrication
PMUT
Optoelectronics
Correction
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