On the Temperature Dependence of Plasma Polymerization

A simple model is developed to explain the measured temperature dependence of the growth rate of polymerfilms in a C6H6-Ne-glow discharge. The negative Arrhenius-behaviour obtained that means a decreasing growth rate with increasing temperature — is determined by an adsorption-desorption-equilibrium of the monomer particles on the surface. From the fitting of the temperature behaviour experimentally obtained by probe measurements some characteristic parameters (activation energy, residence time) were calculated by means of the model.