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HIGH-RATE HIGH-DENSITY ICP ETCHING OF GERMANIUM
HIGH-RATE HIGH-DENSITY ICP ETCHING OF GERMANIUM
2019
P. B. Lagov
V. M. Maslovsky
Yu. S. Pavlov
E. S. Rogovsky
A.S. Drenin
Vitalii Bondariev
Keywords:
Solar cell
Etching
Metallurgy
Germanium
Chemistry
high density
Analytical chemistry
high rate
Correction
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