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Assessment of Industry Research Priorities for Intelligent Sensors and Control
Assessment of Industry Research Priorities for Intelligent Sensors and Control
2008
YaShian Li-Baboud
Julien M. Amelot
Julien Le Guen
Alan Weber
Paul McGuire
Keywords:
Semiconductor device fabrication
Wireless sensor network
Advanced process control
Intelligent sensor
Intelligent control
Manufacturing engineering
Engineering
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