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Strain mapping of 45 nm MOSFET by dark-field inline electron holography
Strain mapping of 45 nm MOSFET by dark-field inline electron holography
2010
V. B. Özdöl
C. T. Koch
P. A. van Aken
Keywords:
Analytical chemistry
MOSFET
Dark field microscopy
Electron holography
Materials science
Strain (chemistry)
strain mapping
Correction
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