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Development of the Trench MOSFET Process for Power IC
Development of the Trench MOSFET Process for Power IC
1996
Hitoshi Ninomiya
Mitsuasa Takahashi
Hidenobu Miyamoto
Kiyoyuki Satoh
Keywords:
Power semiconductor device
MOSFET
Electronic engineering
Trench
Materials science
trench mosfet
Optoelectronics
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