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A new cellular etching-simulator for InP and Si
A new cellular etching-simulator for InP and Si
1997
H.-H. Wehmann
M. Chahoud
A. Schlachetzki
Keywords:
Surface roughness
Analytical chemistry
Materials science
Electronic engineering
Etching
Solid modeling
Magnetoresistance
Indium phosphide
Optoelectronics
Crystallography
Correction
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