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$\bf Sub\mbox{-}0.15\,\mbi{\mu}m$ Pattern Replication Using a Low-Contrast X-Ray Mask
$\bf Sub\mbox{-}0.15\,\mbi{\mu}m$ Pattern Replication Using a Low-Contrast X-Ray Mask
1994
Yukiko Kikuchi
Hiroshi Nomura
Iwao Higashikawa
Yoshio Gomei
Keywords:
Optics
Analytical chemistry
X-ray
Physics
Correction
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