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Demonstration of an Electronic Grade Ti/AlN/Si Metal-Insulator-Semiconductor Capacitor
Demonstration of an Electronic Grade Ti/AlN/Si Metal-Insulator-Semiconductor Capacitor
1996
X Zhang
D. Walker
A. Saxler
P. Küng
J. Xu
Manijeh Razeghi
Keywords:
Insulator (electricity)
Electronic engineering
Semiconductor
Capacitor
Metal
Materials science
metal insulator
Optoelectronics
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