Organically modified, storage stable, UV curable, NIR transparent and layer thicknesses of 1 to 150 mum photoimageable silicic acid, their preparation and their use

1999 
The invention relates to organically modified, stable in storage, UV hardenable, NIR permeable, silic acid polycondensates which can be photo-structured in layers having a thickness of 1-150 mu m. The invention also relates to the production and use thereof as negative resists. The inventive polycondensates can be obtained by condensing organically modified sillanediols of formula (I) with organically modified silanes of formula (II), whereby Ar2Si(OH)2 is formula (I) and RSi(OR')3 is formula (II). The radicals are identical or different and have the following meaning: Ar = a radical with 6-20 carbon atoms and at least one aromatic group, R = an organic radical with 2-15 carbon atoms and at least one epoxy group and/or at least one C=C double-bond, R' = methyl or ethyl. Condensation occurs without the addition of water. The molar ratio of (I) and (II) is 1:1. Up to 90 mol % of the compound of formula (II) can be replaced by condensable compounds of the following: boron, aluminium, silicon, germanium, titanium and zircon.
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