Metal and metal oxide nanoparticles produced by ion implantation in silica: A microstructural study using HRTEM

Abstract Characterization of the morphology of nanoparticles of Ag and Cu and their oxides obtained by ion implantation in silica and a subsequent thermal annealing in a reducing or in an oxidizing atmosphere, was carried out by high-resolution transmission electron microscopy. The studied nanoparticle size range was2–23 nm. Typical structures such as fcc cuboctahedra have been obtained in the all the size range, for both, the metal and oxide nanoparticles. The truncated decahedron structure was frequently present in Ag and Cu nanoparticles in the 4–6 nm range size. The nanoparticle size distribution, as well as the particle composition, depends on the annealing atmosphere.