Mechanisms of TiN Effective Workfunction Tuning at Interfaces with HfO2 and SiO2
2020
By use of a combination of electrical measurements and internal photoemission interface barrier characterization, the effective workfunction (EWF) changes of nm-thin TiN layer deposited on top of o...
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
56
References
1
Citations
NaN
KQI