High signal-to-noise ratio Langmuir probe system

A new Langmuir probe system based on integrator is introduced.New features of the system include: the integrator network to implement the process of analog-to-digital conversion and to provide effective noise suppression;data processing card to communicate with the host computer.It gives a noise elimination method which increased signal-to-noise ratio dramatically.Successful operation of the system has been demonstrated in the electrically noisy environment of an ECR plasma source.